Berlin 2024 – wissenschaftliches Programm

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HL: Fachverband Halbleiterphysik

HL 36: Poster III

HL 36.55: Poster

Mittwoch, 20. März 2024, 18:00–20:30, Poster E

Challenges in optical detection of high-amplitude deflections of micro- and nanomechanical systems — •Jannik Dornseiff, Mengqi Fu, Fan Yang, and Elke Scheer — Universität Konstanz, Deutschland

Micro-electro-mechanical systems (MEMS) and their behavior in the nonlinear, high amplitude regime have gathered great interest for research as well as for many engineering applications, like signal processing [1] and amplification [2], mass sensing [3], displacement measurement [4] and more. Optical detection methods, like digital holography microscopy (DHM) or Michelson interferom- etry are versatile and efficient methods of investigating MEMS, but they come with challenges, particularly when it comes to the calibration of the deflection amplitude [5]. By comparison of the results obtained with different instruments, acquisition schemes and analysis methods [6, 7] we are able to identify artifacts, arising from the nonlinear optical transduction when the deflection amplitude overcomes a certain fraction of the optical wavelength used for the detection. We give several examples and also discuss mitigation strategies to minimize these artifacts.

[1] Erbe A et al Appl. Phys. Lett. 77 3102-4 (2000); [2] Almog R et al Appl. Phys. Lett. 88 213509 (2006); [3] Buks E and Yurke B Phys. Rev. E 74 046619 (2006); [4] Trusov A and Shkel A J. Micromech. Microeng. 17 1583-92 (2007); [5] Dolleman RJ et al Appl. Phys. Lett. 111 253104 (2017);[6] Waitz R et al Phys. Rev. B 85 035324 (2012); [7] Yang F et al Sensors and Actuators A: Phys. 354 114307 (2023)