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Dresden 2026 – wissenschaftliches Programm

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DS: Fachverband Dünne Schichten

DS 20: Poster

DS 20.12: Poster

Donnerstag, 12. März 2026, 18:30–20:30, P2

Tailoring of MoO3 Thin Films by Irradiation with Energetic Heavy Ions — •Islam Al-Hamad1, Ayman El-Said1, Mohammad Al-Kuhaili1, Shavkat Akhmadaliev2, and Stefan Facsko21Physics Department and Interdisciplinary Research Center for Advanced Materials, King Fahd University of Petroleum and Minerals, Dhahran 31261, Saudi Arabia — 2Institute of Ion Beam Physics and Materials Research, Helmholtz-Zentrum Dresden-Rossendorf, 01328 Dresden, Germany

In recent years, energetic heavy ions have been used to modify the physical properties of various materials [1]. In this study, we investigate the influence of irradiation of molybdenum trioxide (MoO3) thin films with MeV ions of various parameters [2]. The films were deposited on fused silica using thermal evaporation technique. After irradiation, the films were characterized using optical spectroscopy and XRD techniques, showing the effectiveness of ion-irradiation in tuning the films optical and structural properties by varying ion beam parameters. This is highly important for the design of advanced metal oxide materials for sensing, switching, and energy applications.

Acknowledgements: Parts of this research were carried out at the Ion Beam Center at the Helmholtz-Zentrum Dresden-Rossendorf e. V., a member of the Helmholtz Association. A.S. El-Said acknowledges the support by KFUPM, Saudi Arabia (Project: ISP24236).

[1] A.S. El-Said, S. Rao, S. Akhmadaliev, S. Facsko, Phys. Rev. Appl. 13, 044073 (2020). [2] R. Sivakumar, et al., J. Phys.: Condens. Matter 19, 186204 (2007).

Keywords: heavy ions; MoO3; thin films

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