Dresden 2026 – wissenschaftliches Programm
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DS: Fachverband Dünne Schichten
DS 20: Poster
DS 20.13: Poster
Donnerstag, 12. März 2026, 18:30–20:30, P2
Quantifying surface/H-plasma interactions via in-situ observation of metal - insulator transition (MIT) in rare earth perovskites (MNiO3) — •Balázs Antalicz1, Sophia Sahoo2, Parikshit Phadke1, Roland Bliem1, and Gertjan Koster2 — 1ARCNL, Materials & Surface Science for EUVL, Science Park 106, 1098 XG Amsterdam, The Netherlands — 2University of Twente, Inorganic Material Science Group Hallenweg 23, 7522 NH Enschede, The Netherlands
In ’green’ plasma reactors and semiconductor manufacturing, reactive H species clean surfaces, but also induce degradation, e.g. via blistering or embrittlement. To retain device performance, low-cost & complexity exposure monitoring is required – which faces fundamental challenges.
To solve this, materials with strong response to hydrogenation are of interest. For example, Pt-dissociated H2 was shown to induce MIT in MNiO3 perovskites, which was accompanied by an up to 107-fold electrical resistance increase. Because H-plasma contains multiple pre-activated species, we anticipate simpler sensor designs are possible, without the Pt catalyst.
Using an accelerated plasma exposure tool, we then demonstrate MIT in epitaxially grown, Pt-free NdNiO3. X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS) shows partial Ni3+ reduction, and loss/alteration of crystallinity. Further results explore re-settability by annealing in O2, and correlate O 1s XPS spectra with crystal-field theory, structure changes, and the onset of the insulator state.
Keywords: Plasma-surface interaction; Perovskite; Metal-insulator transition; XPS; XRD