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DS: Fachverband Dünne Schichten
DS 20: Poster
DS 20.25: Poster
Donnerstag, 12. März 2026, 18:30–20:30, P2
Development of sacrificial layers grown on rare-earth scandate substrates for epitaxial KNN/KTN layer transfer — •Diana Avetisyan, Jeremy Maltitz, Jutta Schwarzkopf, and Jens Martin — Leibniz-Institut für Kristallzüchtung
Future technologies in sensing, communication, and computing require integrated devices with ultra-low-loss processing, precise control of photons, electrons, and spins, fast switching, broad frequency operation, and strong nonlinearities. Silicon photonics alone cannot meet these demands, making hybrid integration via layer transfer a promising approach. A promising material is sodium-doped potassium niobate, potassium tantalate, and their alloys to enable integration with photonic and acoustic devices. These materials exhibit exceptional electro-optic coefficients, nonlinear Kerr coefficients, piezoelectric coupling coefficients, and elasto-optic coefficients. The project focuses on transferring freestanding sodium-doped potassium niobate membranes onto SiO2/Si substrates. This involves growing sodium-doped potassium niobate on a sacrificial layer/substrate stack, chemically etching the sacrificial layer, and transferring the membrane. Different substrates and sacrificial layers are explored to achieve crack- and wrinkle-free membranes. The membranes are characterized for surface topography, crystalline structure, ferroelectric, piezoelectric, and electromechanical properties for future device applications.
Keywords: Freestanding; Membrane; Piezoelectric