Dresden 2026 – wissenschaftliches Programm

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DS: Fachverband Dünne Schichten

DS 20: Poster

DS 20.38: Poster

Donnerstag, 12. März 2026, 18:30–20:30, P2

In₂Te₃ as a Covalent Spacer in GeSbTe-based Phase Change Superlattices — •Lucas Bothe¹, Maximilian Buchta¹, and Matthias Wuttig^1,2 — ¹Peter Grünberg Institute - JARA-Institute Energy Efficient Information Technology (PGI-10), FZJ, Jülich, Germany — ²I. Institute of Physics (IA), RWTH Aachen University, Germany

Superlattices (SL) containing GeSbTe are promising material systems to overcome typical shortcomings of Phase Change Materials (PCM) by reducing the reset current by an order of magnitude. The reason for the increased energy-efficiency of SLs remains unclear. Typically, two metavalent materials, e.g. GeSb₂Te₄ and Sb₂Te₃, are used in superlattices to achieve superior switching performance. It is debated that Sb₂Te₃ plays a major role in achieving this performance increase. In this work however, Sb₂Te₃ is exchanged with In₂Te₃, replacing a metavalent with a covalent sesqui-chalcogenide to investigate its influence on the switching performance. In a first step, this work presents the growth of GeSb₂Te₄/In₂Te₃-SLs via MBE. XRD, RHEED, SEM and EDX were employed to characterize the samples. Pronounced Laue Fringes and clearly visible SL satellite peaks in the XRD-scans demonstrate the excellent sample quality and allow for exact characterization of the achieved SL-stacking. RHEED data allows the characterization of the coupling between GeSb₂Te₄ and In₂Te₃, which appears to be weak but not strictly of van-der-Waals character. As a next step the samples will be optically switched with a laser set up to compare the switching characteristics to those of GeSb₂Te₄/Sb₂Te₃-SLs.

Keywords: MBE; PCM; Superlattice; XRD; GST