Dresden 2026 – wissenschaftliches Programm

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DS: Fachverband Dünne Schichten

DS 4: Thin Film Properties II

DS 4.6: Vortrag

Montag, 9. März 2026, 18:00–18:15, REC/C213

Investigations of cubic boron nitride nucleation using in situ RHEED during pulsed laser deposition — •Falko Jahn, Laura Dienelt und Steffen Weißmantel — Laserinstitut Hochschule Mittweida, Technikumplatz 17, 09648 Mittweida

Due to its outstanding properties such as second-highest hardness, the cubic allotrope of boron nitride (c-BN) has attracted significant interest from both academia and industry for decades. So far, challenges in the thin film deposition of this material have prevented a successful industrial application, for example as a wear-resistant coating for cutting tools. Although pulsed laser deposition (PLD) has enabled progress in this particular field, several aspects of the film formation process remain insufficiently understood. In particular, the process of nucleation from the hexagonal to the cubic phase still contains unanswered questions. In this work, the microstructure of the growing film is characterized in situ using reflection high-energy electron diffraction (RHEED). This enabled further insight into the nucleation process. The results provide support for the nucleation model of subplantation. These findings contribute to a deeper understanding of c-BN nucleation during PLD or similar PVD techniques.

Keywords: reflection high energy electron diffraction; cubic boron nitride; pulsed laser deposition; subplantation model