Dresden 2026 – wissenschaftliches Programm
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HL: Fachverband Halbleiterphysik
HL 20: Poster I
HL 20.24: Poster
Dienstag, 10. März 2026, 18:00–20:00, P1
Creating Chalcogenide Aeromaterials through Atomic Layer Deposition — •Vladimir Ciobanu1, Alejandra Ruiz-Clavijo2, Tudor Braniste1, Sebastian Lehmann2, Niklas Wolff3, Dongho Shin2, Eduard Monaico1, Rainer Adelung3, Lorenz Kienle3, Kornelius Nielsch2, and Ion Tiginyanu1 — 1Technical University of Moldova, Chisinau, Moldova — 2Leibniz Institute of Solid State and Materials Research, Dresden, Germany — 3Kiel University, Kiel, Germany
In this work, we report the development of SnS2 and SnSe2 aeromaterials synthesized via ALD on sacrificial ZnO microtetrapod templates. The ALD process enables conformal coating of the 3D ZnO microtetrapod network with precise thickness control. The resulting SnS2 and SnSe2 shells retain the original tetrapodal morphology after selective ZnO removal in acid, forming a hollow microtubular structure with the wall thickness of about 50 nm and exceptionally high porosity. Structural characterization by XRD revealed that the as-deposited films are amorphous, while post-deposition annealing in a S or Se atmosphere at 250 °C induces crystallization of SnS2 or SnSe2. SEM demonstrated uniform coverage and preservation of the porous aeromaterial network. TEM revealed the presence of SnSx or SnSex phases with multidomain. These results highlight the capability of ALD to fabricate crystalline, compositionally controlled, and geometrically complex chalcogenide aeromaterials with strong potential for photoactive and catalytic applications. Acknowledgements: We thank the BMFTR and NARD for the funding of ProMoMo project DEHYCONA.
Keywords: chalcogenide; SnS2; SnSe2; aeromaterials; ALD