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HL: Fachverband Halbleiterphysik
HL 26: Poster II
HL 26.23: Poster
Mittwoch, 11. März 2026, 09:30–11:30, P1
Titania-based aerodynamic nanomaterials produced by atomic layer deposition — •Tudor Braniste1, Vladimir Ciobanu1, Sebastian Lehmann2, Phil Goldberg2, Kornelius Nielsch2, Niklas Wolff3, Lorenz Kienle3, Rainer Adelung3, and Ion Tiginyanu1 — 1Technical University of Moldova, Chisinau, Moldova — 2Leibniz Institute for Solid State and Materials Research, Dresden — 3Institute for Materials Science, Kiel University, Germany
In this work, we report on a technology for the production of TiO2, Zn2TiO4, and Mg2TiO4 aero-nanomaterials. Titanium and magnesium oxides were deposited using atomic layer deposition (ALD) onto a sacrificial network of ZnO microtetrapods. After deposition, the sacrificial ZnO layer was removed using two different technological routes. The first route involves removing the zinc oxide in a citric acid solution at room temperature, followed by critical-point drying of the titania-based material. The second route consists of removing the ZnO substrate in a hydrogen atmosphere at high temperature. At temperatures as high as 850 °C in an atmosphere of H2 + Ar (2% + 98%), the ZnO core decomposes, and the resulting aero-nanomaterial consists of hollow microtetrapods with porous microtubular arms composed of Zn2TiO4 or (ZnMg)TiO2. Scanning and transmission electron microscopy, as well as X-ray analysis, were used to elucidate the morphology, composition, and crystal structure of the produced aeromaterials. The investigations revealed the influence of annealing temperature and the sequence of technological steps on the morphology and properties of the resulting materials.
Keywords: Aero-nanomaterials; Aero-TiO2; ZnO; Aerotitania; Atomic Layer Deposition