Dresden 2026 – wissenschaftliches Programm
Bereiche | Tage | Auswahl | Suche | Aktualisierungen | Downloads | Hilfe
HL: Fachverband Halbleiterphysik
HL 56: Quantum Emitters in 3D Semiconductors
HL 56.2: Vortrag
Freitag, 13. März 2026, 11:30–11:45, POT/0006
Liquid Metal Alloy Ion Sources for Quantum Emitters — •Nico Klingner1, Lukas Prager1, Gregor Hlawacek1, Stefan Findeisen1, Wolfgang Pilz2, and Paul Mazarov2 — 1Institute of Ion Beam Physics and Materials Research, Helmholtz-Zentrum Dresden - Rossendorf (HZDR), Bautzner Landstr. 400, 01328 Dresden, Germany — 2Raith GmbH, Konrad-Adenauer-Allee 8, 44263 Dortmund, Germany
Liquid metal alloy ion sources (LMAIS) have evolved into powerful emitters for generating focused ion beams (FIBs) of a wide range of elemental species. In recent years, they have become a key enabling tools for quantum technologies, supporting applications such as deterministic single-ion implantation, the controlled creation of defect centers acting as single-photon sources, or for local isotopic purification of silicon for quantum-grade materials.
In this contribution, we present an overview of the LMAIS fabrication process, inluding eutectic alloy phase diagrams in selecting suitable compositions, the microfabrication and sharpening of emitter needles, and the challenges of alloy wetting and reservoir filling. As the alloy chemistry and emitter surface are highly susceptible to contamination, all steps are recently carried out under ultra-high-vacuum conditions to prevent oxidation and ensure reproducible operating characteristics.
Finaly we will show a summary and an outlook on single photon emitter production that benefit from the unique versatility of LMAIS-based ion beams.
Keywords: Liquid Metal Alloy Ion Source LMAIS; Focused Ion Beam FIB; Single Photon Emitters; Quantum Applications; Defect Centers