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MA: Fachverband Magnetismus

MA 49: Magnetic Imaging, Information Technology, and Sensors

MA 49.7: Vortrag

Donnerstag, 12. März 2026, 16:30–16:45, POT/0112

Mechanically Flexible High-Resolution Planar-Hall Effect Sensors — •Proloy Taran Das, Jan Schmidtpeter, Pavlo Makushko, Yevhen Zabila, Conrad Schubert, and Denys Makarov — Helmholtz-Zentrum Dresden-Rossendorf e.V., Institute of Ion Beam Physics and Materials Research, Bautzner Landstrasse 400, 01328 Dresden, Germany

Planar Hall effect (PHE) magnetic field sensors are attractive for applications requiring sub-nanoTesla resolution and vector field sensing [1,2]. In this presentation, we will discuss a comparative investigation of rigid and flexible PHE devices, linking their thin-film design and substrate mechanics to performance in sensitivity, linearity, and low-frequency noise. We show that flexible PHE sensors [3], fabricated as bi- and tri-layer elements on polymer substrates, maintain linear response under bending and achieve a magnetic field resolution to a few nT/*Hz at 10 Hz. The performance, rivalling that of rigid silicon-based references, is attained through careful tuning of unidirectional and uniaxial anisotropy through exchange bias, shape and growth effects and a synchronous demodulation readout. The results underscore the potential of PHE sensors for high-resolution biomagnetic sensing and robotics.

References: 1.Proloy T. Das et al. IEEE Trans. Magn. 60(9), 1-4 (2024) 2.*J. Schmidtpeter, Proloy T. Das et al. IEEE Magn. Lett. 15, 4100205 (2024) 3.*H. Nhalil et al. Appl. Phys. Lett. 123, 024102(2023)

Keywords: planar-Hall effect; Flexible Sensors; Low-frequency Noise; Sensitivity; Magnetolectronics