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MM: Fachverband Metall- und Materialphysik

MM 36: Topical Session: Advanced Nanomechanics – Accelerating Materials Physics from the Bottom II

MM 36.2: Vortrag

Donnerstag, 12. März 2026, 16:15–16:30, SCH/A251

Nanomechanics of Silicon: Linking Phase Transitions to High-Temperature Plasticity — •Verena Maier-Kiener and Gerald Schaffar — Montanuniversität Leoben, Department materials Science, Leoben, Austria

This presentation focuses on phase transformations in silicon revealed through high-resolution nanoindentation techniques and their interplay with high-temperature deformation behavior. Using a novel unloading contact pressure approach with continuous stiffness measurement (CSM), pressure-induced phase transitions during indentation are investigated with improved precision. The method enables direct calculation of mean contact pressure during unloading and reveals the influence of load-holding segments on transformation onset, aligning well with high-pressure literature data, and was confirmed by Raman spectroscopy. To contextualize these findings, complementary high-temperature nanoindentation studies are discussed. In monocrystalline (100) silicon, a transition from phase transformation to dislocation-controlled plasticity occurs between 300°C and 400°C, with further changes above 800°C. Additionally, spherical nanoindentation on a 1.2μm silicon film at 500°C and 700°C extracts stress-strain behavior, confirming thermally activated dislocation glide. Together, these results provide a comprehensive view of silicon's mechanical response, bridging nanoscale phase transformation analysis with bulk high-temperature deformation mechanisms.

Keywords: Nanoindentation; high temperature; Silicon; phase transformations