Bereiche | Tage | Auswahl | Suche | Aktualisierungen | Downloads | Hilfe
O: Fachverband Oberflächenphysik
O 44: Scanning probe techniques: Method development – Poster
O 44.11: Poster
Dienstag, 10. März 2026, 14:00–16:00, P2
Correlative AFM-SEM-EDS microscopy on nanoparticles and -wires — Chris Schwalb1, •Lukas Stühn1, Hajo Frerichs1, Sebastian Seibert1, Darshit Jangid1, Marion Wolff1, Kerim Arat2, Hamed Alemansur2, Afshin Alipour2, Andreas Amann2, Luis Montes2, Jost Diederichs2, Jeff Gardiner2, Will Neils2, and Stefano Spagna2 — 1Quantum Design Microscopy GmbH, Pfungstadt, Germany — 2Quantum Design Int., San Diego, USA
Correlative AFM-SEM-EDS microscopy enables multimodal nanoscale analysis but is often hindered by complex sample transfers and the lack of a joined coordinate system. Our approach integrates these techniques to allow simultaneous acquisition of topographical, mechanical, electrical, SEM and EDS data from the same region of interest[1]. We illustrate the advantages of such in-situ correlative measurements through several case studies, including hard-to-access structures such as bone lacunae, individual nanowires on 5 nm TEM grids, and nanoparticles relevant for multimodal characterization workflows[2]. In addition, we present first results on individual ZnO nanowires for energy-harvesting concepts, where SEM enables rapid localization and AFM provides mechanical and electrical characterization[3,4]. Overall, the presented in-situ correlative strategy, the FusionScope, expands the analytical capabilities for nanoscale inspection and process control across a wide range of materials and devices. [1] https://doi.org/10.1093/mictod/qaad083 [2] https://doi.org/10.1093/mam/ozae044.233 [3] https://doi.org/10.3390/mi16080927 [4] https://doi.org/10.1002/adfm.202310110
Keywords: AFM; SEM; correlative microscopy; nanowires; nanoparticles