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O: Fachverband Oberflächenphysik

O 96: Plasmonics and nanooptics: Fabrication, characterization and applications

O 96.3: Vortrag

Freitag, 13. März 2026, 10:00–10:15, HSZ/0403

Layer-Resolved Optical Metrology of MoS₂ Using Surface Plasmon Resonance Imaging — •Priyanka Thawany^1,2, Hesam Amiri¹, Lina Jäckering², Andrei Vescan³, Thomas Taubner², Sven Ingebrandt¹, and Vivek Pachauri¹ — ¹Institute of Materials in Electrical Engineering 1 (IWE1), RWTH Aachen University — ²I. Institute of Physics (IA), RWTH Aachen University — ³Compound Semiconductor Technology, RWTH Aachen University

Conventional techniques such as scanning probe microscopy, Raman spectroscopy [1], ellipsometry [2], and terahertz microscopy [3] provide crucial information on optical and electronic parameters of 2D materials. However, they remain limited in measurement speed and spatial coverage for large-area characterization. To address these limitations, we demonstrate the use of surface plasmon resonance imaging (SPRi) as a complementary wide-field technique for mapping few-layer MoS₂ stacks. Thickness-dependent shifts in the SPR resonance angle and corresponding reflectance contrast allow clear discrimination of atomic-layer regions, consistent with theoretical predictions for MoS₂ optical permittivity changes. SPRi therefore offers a rapid, scan-free approach for real-time metrology of few-layer MoS₂, and similar measurements on other 2D materials show the same suitability for rapid optical characterization. [1] Malard et al., Phys. Chem. Chem. Phys. 23, 23428 (2021). [2] Amiri et al., Nano Trends 111, 100130 (2025). [3] Whelan et al., Sci. Rep. 14, 3163 (2024).

Keywords: SPR imaging; MoS$_2$; optical metrology; refractive index; 2D materials