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TT: Fachverband Tiefe Temperaturen
TT 32: Nanomechanical systems (joint session HL/TT)
TT 32.3: Vortrag
Dienstag, 10. März 2026, 10:30–10:45, POT/0051
FEBID and FIBID nanowire field emitters integrated with microcantilevers - fabrication and characterization — •Ewelina Gacka1,2, Gregor Hlawacek1, Krzysztof Kwoka2, Tomasz Piasecki2, Bartosz Pruchnik2, René Hübner1, and Teodor Gotszalk2 — 1Institute of Ion Beam Physics and Materials Research, Helmholtz-Zentrum Dresden-Rossendorf, 01328, Dresden, Germany — 2Department of Nanometrology, Wroclaw University of Science and Technology, 50-370, Wroclaw, Poland
Because micro- and nanomechanical systems are continuously evolving, there is a need to leverage various fabrication technologies. A scanning electron microscope with a gallium focused ion beam, as well as a helium ion microscope, were used to integrate platinum-carbon (Pt-C) and tungsten-carbon (W-C) nanowire field emitters with microcantilevers, serving as deflection sensors. Pt-C and W-C nanocomponents were fabricated using an additive, direct-writing method - focused-electron-/ion-beam-induced deposition (FEBID/FIBID)[1,2]. After growth calibration, the field emission behavior was studied in situ inside a vacuum chamber. The deposited Pt-C and W-C materials were characterized using Kelvin probe force microscopy and transmission electron microscopy. [1] T. Piasecki et al., Nanotechnology 35 (2024), doi: 10.1088/1361-6528/ad13c0. [2] E. Gacka et al., Measurement 234 (2024), doi: 10.1016/j.measurement.2024.114815.
Keywords: Field emitters; Scanning electron microscopy; Helium ion microscopy; Nanoelectromechanical systems; Microelectromechanical systems