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P: Fachverband Plasmaphysik

P 16: Poster Session Plasma Physics

P 16.50: Poster

Donnerstag, 19. März 2026, 13:45–15:45, Redoutensaal

System-theoretic view of the pMRP — •Paria Keramatbaksh¹, Dennis Krüger¹, Jens Oberrath², Crispin Ewuntomah², and Ralf Peter Brinkmann¹ — ¹Ruhr-University Bochum, Germany — ²South Westphalia University of Applied Sciences, Germany

The term Active plasma resonance spectroscopy (APRS) denotes a family of diagnostic methods which exploit the ability of low-pressure plasmas to exhibit pronounced resonances when excited by a signal in the radio-frequency range. The planar multipole resonance probe (pMRP) implements this time-honored concept in a wall-embedded, non-intrusive geometry suited for industrial environments.

For modeling purposes, a system-theoretic point of view is adopted.
The radio-frequency signal source is coupled via a 50 Ω coaxial transmission line to a spatially extended probe structure, which is interpreted as a four-port network. Through a planar interface, the probe is coupled to the plasma, represented as a two-port characterized by its spectral admittance Y(k,ω). Earlier studies have established a quantitatively accurate representation of Y(k,ω) based on kinetic theory [1]. In the present work, the focus is instead on the mathematical formulation of the coupling itself. As a deliberate simplification, the plasma response is described by the classical Drude model. This reduced description provides a transparent baseline for analyzing probe-plasma coupling and enables systematic comparison with commercial electromagnetic simulations.

[1] C. Wang et al. Plasma Sources Sci. Technol. 30, 105011 (2021)

Keywords: Plasma diagnostics; Modeling and simulation