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Erlangen 2026 – wissenschaftliches Programm

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P: Fachverband Plasmaphysik

P 19: Atmospheric Pressure Plasmas III

P 19.2: Vortrag

Donnerstag, 19. März 2026, 17:45–18:00, KH 01.020

Using the AD8302 phase detector for power measurements of RF-driven plasmas — •Steffen Schüttler1, Michael Roloff1, Sven Weller2, Michael Konkowski2, and Judith Golda11Plasma Interface Physics, Ruhr University Bochum, Bochum, Germany — 2Chair for Experimental Physics II - Reactive Plasmas, Ruhr University Bochum, Bochum, Germany

The use of reference standards for plasmas in laboratories guarantees reproducible results. By this, plasma processes can be thoroughly investigated, as the results are comparable and the focus is on plasma physics rather than on comparing different plasma sources. This was the idea behind the design of the COST reference plasma jet [1]. However, the measured values for plasma characterisation are still diverse. Some groups measure the dissipated plasma power while others only provide the applied voltage, as proper power measurements require a high-resolution oscilloscope (expensive and not everywhere available) to measure the phase shift between voltage and current. But the applied voltage is an external parameter that provides poor insights into the plasma itself. For example, the dissipated plasma power differs at the same external voltage for different feed gases and reactive admixtures. In this work, we provide a new method that uses the AD8302 phase detector to measure the phase shift between voltage and current of the COST reference plasma jet. This offers an easy-to-implement and low-cost alternative for measuring the dissipated plasma power of RF-driven plasmas such as the COST reference plasma jet.

[1] Golda et al. J. Phys. D: Appl. Phys. 49 (2016) 084003 (11pp)

Keywords: AD8302 phase detector; COST reference plasma jet; Power measurements; Plasma diagnostics

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