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P: Fachverband Plasmaphysik
P 23: Low Pressure Plasmas IV
P 23.2: Vortrag
Freitag, 20. März 2026, 11:15–11:30, KH 01.012
Numerical studies on extreme-ultraviolet-induced low density hydrogen plasmas — •Adelind Elshani1, Ahmet Aksoy1, Linus Nagel1, Sascha Brose1,2, Rolf Wester2, Annika Bonhoff1, and Carlo Holly1,2 — 1RWTH Aachen University TOS, Aachen — 2Fraunhofer Institute for Laser Technology ILT, Aachen
The interaction of extreme-ultraviolet (EUV) radiation with low-pressure hydrogen gas induces a low-density hydrogen plasma. Understanding the underlying chemical and dynamic processes is essential but complicated due to plasma formation complexity and correlated influencing factors during experiments. Dedicated stand-alone setups using discharge-produced plasma EUV radiation sources allow for reduction of experimental complexity and simplified setups. In addition, experimental parameters can be systematically varied and adjusted leading to controllable boundary conditions. As a result, fundamental dependencies with mostly unbiased parameters can be experimentally investigated, covering intensity or power optimized exposures at 13.5 nm, with narrow to broadband spectral distributions in hydrogen gas atmospheres. An according modeling framework, adaptable to these setups is developed to link the experimental data with theoretical models. The combination of experiment and simulation enables an in-depth understanding of the EUV-induced hydrogen plasma formation. The presentation covers the key components of the modeling framework based on a kinetic approach, along with an analysis of the electron dynamics for high-intensity EUV exposure configurations.
Keywords: EUV-induced plasma; Plasma simulation; Hydrogen plasma; Molecular processes; Electron dynamics