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P: Fachverband Plasmaphysik

P 4: Codes and Modeling I

P 4.3: Vortrag

Montag, 16. März 2026, 17:15–17:30, KH 01.020

Modeling the Influence of Dielectric Materials on Plasma Characteristics in Capacitively Coupled Plasma Systems — •Mine Fakili, Neslihan Sahin, and Murat Tanisli — Department of Physics, Division of High Energy and Plasma Physics, Eskisehir Technical University, Eskişehir, Türkiye

In this study, the spatial distributions of plasma parameters in a 13.56 MHz single-frequency capacitively coupled plasma system were investigated with a focus on the effects of a dielectric material. The Poisson equation, together with the electron and ion continuity equations and the electron energy equation, were solved simultaneously. The system of equations was discretized using the finite difference method and iteratively solved employing the Newton*Raphson technique. The model considers the effect of the dielectric material placed between the electrodes on the electric field, charge density, plasma potential and electron temperature. Numerical results demonstrate that the dielectric material causes to significant variations in plasma density, potential profiles, and electron energy distribution. The model provides highly accurate results in the design and optimization of industrial plasma processes, making a significant contribution to fields such as semiconductor manufacturing and thin film deposition.

Keywords: Capacitively Coupled Plasma; Dielectric Materials; Plasma Characteristics; Electron Density; Ion Density