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P: Fachverband Plasmaphysik

P 5: Low Pressure Plasmas I

P 5.1: Hauptvortrag

Dienstag, 17. März 2026, 11:00–11:30, KH 02.016

Nanoparticles prepared by sputter-driven gas aggregation — •Andrey Shukurov — Charles University, Faculty of Mathematics and Physics, Department of Macromolecular Physics, Prague, Czech Republic

Sputter-driven gas aggregation, first pioneered by the Freiburg group in the 1990s, has become a well-established and versatile method for synthesizing metal nanoparticles (NPs) through the condensation of atomic metal vapors in a cold inert gas. While planar magnetrons have traditionally been used for this process, the gradual evolution of their erosion tracks imposes limitations on process stability and controllability. Cylindrical magnetrons offer an effective way to overcome these constraints and significantly extend target lifetime. However, despite their widespread use in thin-film deposition, cylindrical magnetrons have not yet been adapted for gas-phase nanoparticle synthesis. In this contribution, we demonstrate the use of dc planar and cylindrical magnetrons for the gas-phase production of metal NPs, including hybrid bimetal nanoparticles with complex morphologies such as core@shell and Janus structures. We further present reactive sputtering in Ar/N2 mixtures, which enables the synthesis of metal nitride (MeN) nanoparticles, where Me = Ti, Zr, Hf, Cu, or Fe. By systematically varying gas composition, pressure, and discharge current, we obtain nanoparticles with tunable size distributions and chemical compositions. The resulting materials show strong potential for applications in refractory plasmonics, solar-light harvesting, and electrochemical CO2 reduction. Representative results will be presented and discussed.

Keywords: magnetron; sputtering; nanoparticles