Erlangen 2026 – wissenschaftliches Programm
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T: Fachverband Teilchenphysik
T 74: Gaseous Detectors II
T 74.7: Vortrag
Donnerstag, 19. März 2026, 17:45–18:00, KH 01.014
From Wafer to Detector: GridPix Production at the FTD — •Sabine Hartung, Yevgen Bilevych, Jochen Kaminski, and Klaus Desch — Physikalisches Institut Universität Bonn
GridPix detectors combine a pixel ASIC with an integrated Micromegas-type amplification structure (InGrid). The photolithographic fabrication of the grid directly on the Timepix/Timepix3 ASIC enables precise alignment of grid holes to the pixels and a well-defined amplification gap. This provides single-electron efficiency and an excellent spatial resolution. Such properties make GridPix detectors a promising candidate for precision TPCs as well as X-ray and low-background applications.
The production of GridPixes requires a sequence of photolithographic steps. To reduce the probability of spark damage during the operation, the chip is first coated with a SixNy protection layer. As amplification gap an aluminium grid is built on top of freestanding pillars. Achieving high production yield demands precise control of technological conditions.
In this contribution, the first results of the GridPix production as implemented in the Forschungs- und Technologiezentrum Detektorphysik (FTD) in Bonn are presented.
Keywords: Tracking Detector; GridPix