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A: Fachverband Atomphysik

A 14: Poster – Precision Spectroscopy of Atoms and Ions (joint session A/Q)

A 14.2: Poster

Dienstag, 3. März 2026, 17:00–19:00, Philo 1. OG

Metallic-Magnetic Calorimeters for Efficient High Resolution X-ray Spectroscopy for Energies up to 150 keV — •Daniel Kreuzberger, Andreas Abeln, Hendrik Hadenfeldt, Daniel Hengstler, Andreas Reifenberger, Daniel Unger, Andreas Fleischmann, Loredana Gastaldo, and Christian Enss — Kirchhoff-Institute for Physics, Heidelberg University, Germany

Metallic Magnetic Calorimeters are cryogenic detectors for broadband x-ray spectroscopy with high energy resolution and small, well understood non-linearity. They consist of a metallic particle absorber, typically made of gold and a paramagnetic temperature sensor made of an erbium doped noble metal host material. If a photon is absorbed, its energy is converted to heat, leading to a temperature change of the sensor material. This temperature rise changes the magnetization of the sensor material, which is read out by a sensitive SQUID magnetometer.

Experiments on highly charged ions and light muonic atoms have brought up the necessity to build densely packed arrays of MMCs with a high stopping power for photon energies up to 150 keV. This can be achieved with the presented new microfabrication-process for 120 µm thick absorbers made of electroplated gold. We also present fabrication results for the fast thermalization of the MMCs using the backside of the silicon substrate, which can be achieved by using DRIE processes, and filling these TSVs with copper. Finally we present characterization results for two different MMC arrays fabricated with those newly developed processes and results from most-recent beamtimes.

Keywords: Metallic Magnetic Calorimeter; X-ray spectroscopy; Single photon detector; Muonic Atoms; Highly Charged Ion spectroscopy