Mainz 2026 – wissenschaftliches Programm

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Q: Fachverband Quantenoptik und Photonik

Q 26: Poster – Ultrashort Pulses and Strong Fields (joint session K/Q)

Q 26.2: Poster

Dienstag, 3. März 2026, 17:00–19:00, Philo 1. OG

A Flexible Laser Micromachining Platform for Fabricating Integrated Photonic Systems in Transparent Materials — •Yassin Nasr, Patrick Hildebrand, Veronica Montoya, Thilo Danner, Andreas Michalowski, and Tobias Menold — University of Stuttgart - Institut für Strahlwerkzeuge (IFSW), Stuttgart, Germany

The increasing demand for compact, robust, and fully integrated photonic systems requires fabrication tools that can structure transparent materials with high precision and three-dimensional flexibility. Many established laser micromachining studies rely on highly specialized setups optimized for a single process, limiting systematic comparisons and slowing scientific progress. To overcome these constraints, we developed a laser micromachining platform that combines multiple ultrafast laser processes into one versatile system architecture.

The setup combines a high-NA microscope objective for generating micrometer-scale focal spots, a galvanometric scanner and a high-precision XYZ translation stage for dynamic 3D processing and a spatial light modulator (SLM) for dynamic correction of aberrations and controlled beam shape inside transparent materials.

This architecture enables scientific investigations of various laser-based micromachining processes like direct laser writing of waveguides, selective laser etching to create integrated microstructures like lenses and laser-assisted bonding for joining glass substrates. All these processes form the technological basis for the scalable fabrication of robust integrated photonic systems on one single manufacturing platform.

Keywords: Laser Micromachining; Transparent Materials; Photonic Systems; Optical Setup; High NA