Bereiche | Tage | Auswahl | Suche | Aktualisierungen | Downloads | Hilfe

Q: Fachverband Quantenoptik und Photonik

Q 40: Poster – Photonics

Q 40.2: Poster

Mittwoch, 4. März 2026, 17:00–19:00, Philo 1. OG

Fabrication approach for all-diamond nano-cavity structures in submicron membranes — •Kilian Mark, Jan Fait, and Christoph Becher — Universität des Saarlandes, Campus E2.6, 66123 Saarbrücken, Germany

Tin-vacancy (SnV) centers in diamond combine excellent optical properties with long spin-coherence times, making them promising candidates for spin-photon interfaces in quantum technologies [1]. However, photon collection efficiency from bulk diamond is low due to total internal reflection at the diamond-air interface [2]. It is crucial for most applications to improve the collection efficiency of photons, which can be achieved by using nanophotonic structures. This contribution presents the individual fabrication steps towards bull’s eye cavities in thin diamond membranes, focusing on the use of a thin silicon (Si) layer as a hard mask to etch the diamond via inductively coupled plasma reactive ion etching (ICP-RIE). The Si layer is patterned in an SF₆:C₄F₈ plasma to obtain sharp features with vertical sidewalls, which are subsequently transferred into the diamond using an Ar:O₂ plasma. *Tests on bulk diamond with feature dimensions adapted to the SnV emission wavelength (619 nm) show promising results with steep angles and small roughness of the sidewalls. We will report on first experiments on deterministic implantation of SnV centers at the center of the bulls-eye structures. *[1] J. Görlitz et al., npj Quantum Inf 8(45), 2022 *[2] E. Janitz et al., Optica 7(10), 2020

Keywords: tin vacancy centers; collection efficiency; nanofabrication; diamond membrane; bull's eye cavitie