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Q: Fachverband Quantenoptik und Photonik

Q 41: Poster – Quantum Technologies II & Laser Technology

Q 41.12: Poster

Mittwoch, 4. März 2026, 17:00–19:00, Philo 2. OG

Packaging of All-Laser-manufactured Vapor-cell for Interposer integrated Quantum sensing — •Patrick Hildebrand, Yassin Nasr, Veronica Montoya, Thilo Danner, Andreas Michalowski, and Tobias Menold — University of Stuttgart, Institut für Strahlwerkzeuge (IFSW), Stuttgart, Germany

This work presents a concept for a fully laser-fabricated, photonic-integrated vapor cell intended for compact quantum sensors such as chip-scale magnetometers and gyroscopes. The approach combines femtosecond direct writing for waveguide formation with Selective Laser Etching (SLE) to create the vapor-cell cavity and internal micro-optics. Elements such as micromirrors and integrated miniature lenses are designed to reduce coupling losses between the waveguides and the vapor cell as well as to a flip-bonded laser diode and photodiode. Laser-based bonding is proposed for hermetic sealing without mechanical alignment or additional materials.

Compared with conventional MEMS vapor cells relying on free-space optics, this glass-based architecture embeds all optical paths directly into the substrate, eliminating external alignment components and reducing sensitivity to vibration and temperature variations. Combining waveguide writing, cavity formation, micro-optics fabrication, and bonding into a single laser-based process chain is expected to simplify assembly and improve reproducibility. The concept outlines a path toward integrated vapor-cell modules that are robust, compact, and scalable for industrial production.

Keywords: Integrated Quantum Sensing; Laser Micromachining; Integrated Photonics