Mainz 2026 – wissenschaftliches Programm
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Q: Fachverband Quantenoptik und Photonik
Q 66: Poster – Quantum Technologies III
Q 66.18: Poster
Donnerstag, 5. März 2026, 17:00–19:00, Philo 2. OG
Advanced fabrication and characterization of solid immersion lenses in diamond and silicon carbide — •Alexander Spyrantis1,2, Anna Mogilatenko1, Kilian Unterguggenberger2, Stefan Facsko3, Bailiang Li4, Gerhard Hobler4, Tommaso Pregnolato1,2, Tim Schröder1,2, and Katja Höflich1,2 — 1Ferdinand-Braun-Institut (FBH), 12489 Berlin, Germany — 2Humboldt-Universität zu Berlin, Institut für Physik, 12489 Berlin, Germany — 3Helmholtz-Zentrum Dresden-Rossendorf, 01328 Dresden, Germany — 4Technische Universität Wien, 1040 Wien, Austria
Solid immersion lenses (SILs) are hemispherical microstructures that increase the light collection efficiency of defect-based quantum emitters in high refractive index materials like diamond and silicon carbide. They can be created by focused ion beam (FIB) milling in a mask-less approach.
Previous attempts required post-processing and lacked reproducibility due to beam damage and redeposited material at the side walls. Using a continuous spiral pattern, we resolved those issues and achieved SILs with optimal curvature, yielding a 8.5-fold improvement in the light collection efficiency for NV centers in diamond.
Depending on the ion beam energy, step edges of different sizes form at the side walls of the lens. This is studied using continuum and binary collision modeling. In line with the predictions from modeling, microstructural characterization shows only a thin amorphization layer on the intact crystalline material due to the suppressed redeposition.
Keywords: quantum systems; solid immersion lens; focused ion beam; diamond; nitrogen vacancy center