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Q: Fachverband Quantenoptik und Photonik
Q 77: Photonics – 3D Printing
Q 77.1: Vortrag
Freitag, 6. März 2026, 14:30–14:45, P 2
High-Fidelity Transfer of 3D-Printed Freeform Micro-Optics into Scalable Polymer Replication — •Leander Siegle1, Stefan Wagner2,3, Stephan Haeusler3, Philipp Flad1, Mario Hentschel1, Thomas Günther2, André Zimmermann2,3, and Harald Giessen1 — 14th Physics Institute, University of Stuttgart, Pfaffenwaldring 57, 70569 Stuttgart, Germany — 2Institute for Micro Integration (IFM), Allmandring 9B, 70569 Stuttgart, Germany — 3Hahn-Schickard, Allmandring 9B, 70569 Stuttgart, Germany
We present a scalable process for fabricating aspherical and hybrid achromatic micro-lens arrays by combining two-photon polymerization grayscale lithography with electroplating and injection molding. Master structures containing 1632 lenses with 100-300 µm diameter and 100-1000 µm focal length were 3D-printed using a Nanoscribe Quantum X and replicated in cyclic olefin copolymer (TOPAS 5013L-10) using nickel molds. The replicas showed sub-micron deviations and a surface roughness of 6-20 nm, comparable to the 3D-printed masters (4-17 nm). Optical tests confirmed close to diffraction-limited focusing, and high-contrast and distortion-free imaging up to 161 lp/mm. Hybrid lenses maintained achromatic performance across 500-700 nm. Our method enables high-fidelity, cost-efficient mass production of freeform and hybrid micro-optics for imaging, sensing, and photonic integration.
Keywords: Replication; 3D printed micro-optics; Injection Molding; Grayscale Lithography; Additive Manufacturing