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DS: Dünne Schichten
DS 3: Sonstiges I
DS 3.3: Vortrag
Montag, 17. März 1997, 10:45–11:00, ZB
Structure and stability of the cubic FeN phase produced by magnetron sputtering — •L. Rissanen, K.-P. Lieb, and P. Schaaf — II. Physikalisches Institut, Universität Göttingen, D-37073 Göttingen
Fe-N films were deposited onto Si and SiO2 substrates by reactive magnetron sputtering over a wide range of concentrations [1]. The nitrogen and argon gas-flow and the substrate temperature were systematically changed. Thus it was also possible to produce films where γ″-FeNy coexist with γ‴-FeNy [2,3]. The nitrogen concentration of these films is about 50 at.% and they were analysed by Conversion Electron Mössbauer spectroscopy (CEMS), Rutherford backscattering spectrometry (RBS) and X-ray diffraction (XRD). The analyses of the CEMS spectra containing several subspectra are discussed with respect to the nitrogen content. The XRD spectra can be identified as cubic phases with a=0.446 nm (γ″) and a=0.435 nm (γ‴). The γ″-phase is determined to have a ZnS-type structure and the γ‴-phase a NaCl-type structure, respectively [3]. The Fe-N phase (γ″ and/or γ‴) is stable at least up to a temperature of about 610 K [2].
[1] M.Niederdrenk et al., J. Alloys and Compounds 237 (1996) 81-88
[2] L.Rissanen et al., in: Conference Proceedings vol. 50 ”ICAME-95”, ed. I. Ortalli (SIF,Bologna,1996) pp.595-598
[3] H.Nakagawa et al., Hyperfine Interaction 69 (1991) 455-458