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DS: Dünne Schichten

DS 17: Ionenimplantation III

DS 17.4: Talk

Thursday, March 29, 2001, 12:00–12:15, S 5.1

Ion Acoustic Microscopy for Imaging of Buried Structures Based on a Focused Ion Beam System — •Chavkat Akhmadaliev¹, Lothar Bischoff¹, Jochen Teichert¹, Kassym Kazbekov², and Bernd Köhler³ — ¹Forschungszentrum Rossendorf e. V., Institut für Ionenstrahlphysik und Materialforschung, PF 510119, D-01314 Dresden, Deutschland — ²Kazakh National Technical University, Satpaev str. 22, 480013 Almaty, Kazakhstan — ³Fraunhofer-Institut für zerstörungsfreie Prüfverfahren,Aussenstelle EADQ Dresden, Krügerstr. 22, D-01326 Dresden, Deutschland

An intensity modulated focused ion beam (FIB) which is hitting the surface of a solid, leads to a small temperature variation in the near subsurface region which is sufficient for thermal elastic wave generation. The measurement of these waves can be used for analysis and imaging of surface as well as subsurface structures in the material. The modified FIB equipment IMSA-100 working with 35 keV Ga+ and Au+ ions with ion beam current of about 3 nA was employed to obtain acoustic images from structures on silicon and glass targets. The acoustic signals were detected using a PZT transducer delivering an output voltage of about 50 - 100 nV. The beam modulation frequency was varied in the range of 60 - 170 kHz. The obtained lateral resolution of the ion acoustic images at these frequencies was about 15 microns on silicon and about 7 microns on glass. We are going to increase the modulation frequency up to MHz range in order to reach sub-micron resolution.