Dresden 2003 – wissenschaftliches Programm
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CPP: Chemische Physik und Polymerphysik
CPP 22: POSTER C
CPP 22.26: Poster
Donnerstag, 27. März 2003, 12:00–14:00, ZEU/250
µGISAXS - A new method for investigating gradient multilayer nanostructures — •Stephan V. Roth1, Peter Müller-Buschbaum2, Manfred Burghammer1, and Christian Riekel1 — 1ESRF, B.P. 220, F-38043 Grenoble Cedex, France — 2TU München Physik Department LS E13, James-Franck-Str.1, 85747 Garching
Grazing Incidence Small Angle X-ray Scattering (GISAXS) has proven to be a powerful method for determining non-destructively the structure and morphology of lateral homogeneous patterned thin films [1]. Its main advantage is the order-of-magnitude increase in the achievable resolution compared to conventional SAXS experiments. By combining a micrometer-sized synchrotron X-ray beam [2] with a specifically designed GISAXS setup adapted to the micrometer sized X-ray beam we developed an advanced characterization method, namely microbeam GISAXS (µGISAXS). This unique combination of the micrometer-sized beam with the reflection geometry allows to scan laterally inhomogeneous samples on a micrometer scale and hence to gain two orders of magnitude in spatial resolution compared to conventional GISAXS experiments. To demonstrate this powerful new technique we used as a model system a novel gradient multilayer sample consisting of nanometer-sized self-assembled gold (Au) clusters on top of a 40 nm thick polymer layer [3].
[1] P. Müller-Buschbaum et al. Europhys. Lett. 42, 517 (1998)
[2] C. Riekel et al. J. Appl. Cryst. 33, 421 (2000)
[3] T. Vo-Dinh et al. J. Raman Spectrosc. 30, 785 (1999)