Dresden 2003 – wissenschaftliches Programm
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DS: Dünne Schichten
DS 24: Poster
DS 24.27: Poster
Dienstag, 25. März 2003, 14:30–17:00, P2a
Diagnostics of Polymer Films Deposited in Dielectric Barrier Discharge (DBD) in Ar/CxFy mixtures — •I. P. Vinogradov, M. Shakhatre, and A. Lunk — Institut für Plasmaforschung, Universität Stuttgart, Pfaffenwaldring 31, 70569 Stuttgart
Dielectric barrier discharges at atmospheric pressure in a mixture of Ar with fluorocarbon molecules ( C3HF7, C3F8, and c−C4F8) have been studied. Almost all stable products and important radicals in the plasma volume were identified by spectroscopic methods in dependence on gas mixture and admixtures of small amount of N2, H2, and O2. Film diagnostics, as FTIR absorption spectroscopy, XPS and REM were applied to get information of polymer layers (atomic contents and surface topology) deposited. The dependence of CF2:- and CF3- production efficiency on polymer film deposition rate with F/C ratio as parameter was studied. We found that polymer films can be deposited if the ratio F/C is close to 2. FTIR- absorption spectroscopy of films deposited on Si wafer indicates that the main absorption belongs to CF2-groups. In addition, absorption peaks which belong to ”amorphous” PTFE, CF3- groups as well as CF- groups were also observed in the spectra. Comparing the results of FTIR- absorption spectroscopy with those of XPS showed the influence of H2 concentration in the gas mixture on cross linking effects during plasma polymerisation processes.