Dresden 2003 – wissenschaftliches Programm
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DS: Dünne Schichten
DS 24: Poster
DS 24.32: Poster
Dienstag, 25. März 2003, 14:30–17:00, P2a
Gasochromic switching of molybdenum oxide — •John Okumu1,2, Christian Salinga2, Tim Niemeier2, and Matthias Wuttig2 — 1Department of Physics, Kenyatta University, P.O. Box 43844 Nairobi, Kenya — 2I.Physikalisches Institut (1A)- Lehrstuhl fuer Physik der neuer Materialien der RWTH Aachen, D-52056 Aachen
Molybdenum oxide, just like tungsten oxide is an important material with a potential for many technical applications like electrochromic display devices, gas sensing and smart windows. Unlike tungsten oxide, its potential as a gasochromic window coating at room temperature has not been exploited although it is known to be very sensitive to various gases at elevated temperatures (300-600 degrees C). In this paper we report on the optical properties of films prepared by reactive DC magnetron sputtering under various conditions, such as different oxygen partial pressures, and different total pressures. The variation of optical properties upon hydrogen loading at room temperature is measured by spectroscopic ellipsometry, optical spectroscopy and in-situ X-ray reflectometry. Furthermore the incorporation of hydrogen into the film is followed by in-situ stress measurements using the wafer curvature set-up.