Regensburg 2004 – wissenschaftliches Programm

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DS: Dünne Schichten

DS 1: Ionenimplantation I

DS 1.3: Vortrag

Montag, 8. März 2004, 10:00–10:15, HS 31

Self-organisation of thin ceramic films under swift heavy ion bombardment. — •Dereje Etissa-Debissa¹, Melih Kalafat¹, Hartmut Paulus¹, Wolfgang Bolse¹, and Siegfried Klaumünzer² — ¹Institut für Strahlenphysik, Universität Stuttgart — ²Hahn-Meitner Institut, Berlin

Layers consisting of 5 to 260 nm NiO deposited onto SiO₂ have been irradiated with swift heavy ions at liquid nitrogen temperature and large tilt angle (θ>60) between the target surface normal and the beam direction. At low fluences, the initially smooth und coherent NiO-layer revealed periodic cracks, which at increasing fluences reorganize into periodic lamellae. The lamellae are oriented perpendicular to the beam direction projected onto the surface and have a height of 1 µ m, a thickness of about 0,1 µ m and an average distance of 1-3 µ m [1,2]. Here we will report on the relationships between the NiO-layer thickness and the average cracking distance as well as between the incidence angle of the ion beam and the threshold layer thickness, below which cracking does not occur anymore. In addition we will present data on the dependence of the lamellae growth rate on the material and beam parameters. Finally, we will discuss first attempts to utilize this phenomenon for functional nano-structuring of thin-film coatings.

[1] Ando Feyh, diploma thesis, University Stuttgart, 2002

[2] W. Bolse, B. Schattat, A. Feyh, Appl. Phys. A77, 11 (2003)