Regensburg 2004 – wissenschaftliches Programm
O 14: Postersitzung (Adsorption an Oberflächen, Epitaxie und Wachstum, Organische Dünnschichten, Oxide und Isolatoren, Phasenübergänge, Rastersondentechniken, Struktur und Dynamik reiner Oberflächen)
O 14.80: Poster
Montag, 8. März 2004, 18:00–21:00, Bereich C
In-situ SPM usage at MOVPE-conditions — •Markus Breusing, Bert Rähmer, Raimund Kremzow, and Wolfgang Richter — TU-Berlin, Institut für Festkörperphysik, Hardenbergstr. 36, 10623 Berlin
In-situ scanning probe techniques which are applicable in an MOVPE growth environment to directly give quantitative information about the nano-scale topography of the sample do not exist up to now.
Developing a SPM for in-situ MOVPE measurements requires a completely new setup. In comparison to the commercially available SPM-solutions, a number of additional problems have to be solved. The limited space in the MOVPE reactors and the high temperature caused by the thermal conductivity of the carrier gas during growth near the suszeptor requires a special design of the components of the SPM. On the other hand the influence of the SPM components on all growth relevant parameters should be minimized. Therefore the tip has to be quite long than (2 cm) in order to bridge the distance between linertube and susceptor. Nevertheless the construction has to be stable to achieve a good resolution, especially because of the disturbing influence of vibrations, caused by pumping systems, gas-flow, etc. in MOVPE.
The new achievements will be demonstrated.