Regensburg 2004 – wissenschaftliches Programm
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SYLS: Life Sciences on the Nanometer Scale - Physics Meets Biology
SYLS 3: Symposium "Life Sciences on the Nanometer Scale - Physics Meets Biology"
SYLS 3.30: Poster
Mittwoch, 10. März 2004, 16:00–18:30, B
SILICON-ON-INSULATOR NANOWIRE TRANSISTORS FOR BIOSENSOR APPLICATIONS — •Pagra Truman1, Karin Buchholz1, Andreas Kress1, Dominik Scheible2, Marc Tornow1, and Gerhard Abstreiter1 — 1Walter Schottky Institut, TU Muenchen, 85748 Garching, Germany — 2Center for Nanoscience and Sektion Physik, LMU, 80539 Muenchen
Planar semiconductor field effect devices have potential for applications in biosensing such as the label-free detection of DNA or proteins due to their high sensitivity to surface potential changes. Lateral patterning into nanowire-like structures largely increases the surface-to-volume ratio and opens up applications with high spatial resolution.
We present electrical transport measurements on sub-micron transistor structures based on Silicon-on-Insulator (SOI) technology in aqueous solutions. Silicon wires with lateral dimensions of few 100 nm were laterally patterned out of the 30 nm thick top Silicon layer by high resolution electron beam lithography and reactive ion etching. After encapsulation into a fluidic chamber setup the transistor device is operated in an inverted MOSFET mode with an in-plane-gate controlled sensitivity.
Device characterization in aqueous electrolytes of different ionic strength and pH will be presented. We discuss perspectives for the detection of biomolecular interactions at the functionalized Si surface.