Berlin 2005 – wissenschaftliches Programm

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HL: Halbleiterphysik

HL 5: Grenz- und Oberfl
ächen

HL 5.1: Vortrag

Freitag, 4. März 2005, 10:45–11:00, TU P-N202

Simulations of electrical force spectra obtainable on semiconductive surfaces — •F. Müller, A.-D. Müller, and M. Hietschold — Chemnitz University of Technology, Institute of Physics, Solid Surfaces Analysis Group, 09107 Chemnitz

The electrical forces between a metallic tip and a semiconductive surface, as detected in Electrical Force Microscopy (EFM), have been studied for various geometries and substrate properties with the finite element simulation tool FEMLab in two and three dimensions. The electrical force components and their second derivative with respect to the bias have been calculated in dependence on the distance and the tip diameter, because this information is directly comparable with electrical force measurements. The lateral resolution achievable with electrical measurements and its dependence on the substrate properties and the tip geometry are derived and explained quantitatively.