Berlin 2005 – wissenschaftliches Programm

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HL: Halbleiterphysik

HL 58: Poster IIb

HL 58.36: Poster

Dienstag, 8. März 2005, 16:30–19:00, Poster TU F

Integration of three-dimensional photonic crystals onto structured silicon wafers — •Jianhui Ye1, Rudolf Zentel1, Sanna Arpiainen2, and Jouni Ahopelto21Department of Chemistry, University of Mainz, Duesbergerweg 10-14, D-55099 Mainz — 2VTT Centre for Microelectronics, P.O. Box 1208, FIN-02044 VTT

The strong research effort devoted to photonic crystals is motivated by their potential to build a generation of optoelectronic devices of reduced size, combining high integration, and high-speed processing. Advanced photonic circuits will need complex architectures, which can be achieved by using structured silicon substrates as a container, onto which high-quality photonic crystals of controlled size and shape have to be grown.

We report on crystallization of silica spheres of diameter 900 nm on structured silicon wafers with the help of a No-dqdrawing apparatusNo-dq. The crystallization can, thereby, be directed exclusively to the lower lying parts. We optimize the conditions of the crystallization and obtain opals of good quality on patterned substrates, i.e.: (I) good infilling of the structures, flat top surface; (II) 3D order; and (III) absence of cracking. The influence of the complex pattern on the quality of the opals will be discussed.

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DPG-Physik > DPG-Verhandlungen > 2005 > Berlin