# Berlin 2005 – wissenschaftliches Programm

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# HL: Halbleiterphysik

## HL 58: Poster IIb

### HL 58.55: Poster

### Dienstag, 8. März 2005, 16:30–19:00, Poster TU F

**Fabrication of closed single-walled semiconductor microtubes** — •T. Kipp, S. Mendach, H. Welsch, Ch. Heyn, D. Heitmann, and W. Hansen — Institut für Angewandte Physik und Zentrum für Mikrostrukturforschung, Universität Hamburg

The epitaxial lift-off of pseudomorphically strained semiconductor bilayers results in the formation of cylindrical microtubes [1]. These three-dimensional objects have extremely smooth surfaces and thus, they are promising candidates for the realization of novel high-Q optical resonators for light guided along the cylinder perimeter.

Applying the conventional preparation process, microtubes have the shape of rolled-in carpets. Here, we report on a novel technique to prepare closed single-walled microtubes. We define two starting edges on two opposite sides of a thickness modulated strained InGaAs/GaAs mesa and provide both starting edges with unstrained tines. During the final selective etching step the mesa bends up from both starting edges and the straight tines of the opposite sides interlock centrically resulting in a closed single-walled semiconductor tube. Due to its steadiness and the fact that all parameters of the forming tubes can be tuned precisely this interlocking mechanism is a key point for the realization of closed pathways along the perimeter of semiconductor tubes for photons, but possibly also for electrons.

[1] V.Ya. Prinz *et al.*, Physica E **6**, 828 (2000).