Regensburg 2007 – wissenschaftliches Programm
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MA: Fachverband Magnetismus
MA 17: Magnetic Shape Memory Alloys
MA 17.15: Vortrag
Mittwoch, 28. März 2007, 18:45–19:00, H10
Structural, magnetic and phase transformation properties of Fe-Pd thin film composition spreads — Hayo Brunken1,2, Sven Hamann1,2, Sigurd Thienhaus1,2, Alan Savan1, Michael Ehmann1, and •Alfred Ludwig1,2 — 1caesar, Ludwig-Erhard-Allee 2, 53175 Bonn — 2Institut für Werkstoffe, Ruhr-Universität Bochum, 44780 Bochum
Fe-Pd thin film composition spreads have been fabricated by sequential and co-sputtering of elemental targets, both on oxidized Si wafers and on micro-hotplate arrays. The micro-hotplates - microstructured Si3N4 membranes with Pt heaters and measurement electrodes - are used as a materials processing and characterization platform: films can be heated and cooled very quickly with rates of several 1000 K/s which allows for a wide variation of process parameters for the achievement of necessary phases. During the heat treatment, the resistance of the thin film on the micro-hotplate can be monitored, and phase transformations thus can be identified in situ. The films have also been characterized by EDX, XRD, macroscopic resistance versus temperature measurements, and temperature dependent VSM measurements. First results show a phase transformation close to a composition of Fe70Pd30 in an temperature interval from 40°C to 70°C.