Berlin 2008 – wissenschaftliches Programm
Bereiche | Tage | Auswahl | Suche | Downloads | Hilfe
DS: Fachverband Dünne Schichten
DS 12: Thin Film Characterisation: Structure Analyse and Composition (XRD, TEM, XPS, SIMS, RBS, ...)
DS 12.6: Vortrag
Dienstag, 26. Februar 2008, 13:00–13:15, H 2013
Texture analysis on CrSi2: Combining statistical and microscopical information — •Herbert Schletter1, Steffen Schulze1, Michael Hietschold1, Koen De Keyser2, Christophe Detavernier2, Gunter Beddies1, and Meiken Falke1 — 1Institute of Physics, University of Technology, 09107 Chemnitz, Germany — 2Department of Solid State Physics, Ghent University, Belgium 9000
Thin films of CrSi2 on Si(001) were investigated with regard to their texture. Besides the various known epitaxial relations, another type of texture, the so-called axiotaxy, was found. The latter one is characterized by a texture axis with a fixed orientation relative to the substrate common to all crystallites, while there is a rotational degree of freedom around this axis. In contrast to the well-known fiber texture, in case of axiotaxy this texture axis is inclined with respect to the substrate normal leading to a parallel arrangement of low-index planes across the interface. In case of CrSi2, planes of {100}-type are parallel to Si{110} planes, generating an interface structure with one-dimensional periodicity. Due to the energetic advantage resulting thereof, this kind of texture is believed to be a common feature in thin films. In order to reveal the texture of the thin films, electron backscatter diffraction (EBSD) was used. Statistical information on the orientation distribution were obtained and visualized in pole figures. On the other hand, because the measurement is carried out in an SEM, it is possible to assign the orientation to every point on the sample. Thus, information about the correlation between orientation of a crystal and its size and shape are available.