Berlin 2008 – wissenschaftliches Programm
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DS: Fachverband Dünne Schichten
DS 17: Poster: Trends in Ion Beam Technology, Magnetism in Thin Films, Functional Oxides, High-k Dielectric Materials, Semiconductor Nanophotonics, Nanoengineered Thin Films, Layer Deposition Processes, Layer Growth, Layer Properties, Thin Film Characterisation, Metal and Amorphous Layers, Application of Thin Films
DS 17.10: Poster
Dienstag, 26. Februar 2008, 09:30–13:30, Poster A
Spray Pyrolysis as a deposition method for metal-oxide-particles — •Alexandre Santos Abreu1, Christian Berthold1, Matthias Knoll1,2, Armin Konrad2, Reinhard Tidecks1, and Siegfried Horn1 — 1Universität Augsburg, Institut für Physik, EP II, Universitätsstr. 1, D-86159 Augsburg — 2OSRAM GmbH, FL/CFL D-A, Berliner Allee 65, D-86135 Augsburg
Ultrasonic Spray Pyrolysis is a very promising method to produce metal-oxide coatings and particles, respectively, on an industrial scale. Since the Spray Pyrolysis coating process is determined by a large variety of parameters it has the potential to tailor coatings with differ-ent desired properties. For applications a sufficient adhesion as well as an adequate thermal and mechanical stability is required. Here, we demonstrate that the Ultrasonic Spray Pyrolysis is suitable not only to coat planar substrates but also to coat tubular glass substrates.
Using Spray Pyrolysis, yttria was deposited on both, planar and tubular, substrates. A pre-cursor solution containing yttrium nitrate was disposed using an ultrasonic nebulizer. The nebulised droplets subsequently were transferred into a tubular furnace by means of a carrier gas. Additionally particles which were not deposited on the substrate were collected in a glass-fibre filter at the outlet of the furnace. Experiments using different parameter settings were conducted. The as prepared coatings and particles were characterised by SEM and XRD. It is shown how the morphology and chemical composition is controlled by different settings of the processing parameters of the Spray Pyrolysis.