Berlin 2008 – wissenschaftliches Programm
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DS: Fachverband Dünne Schichten
DS 29: Nanoengineered Thin Films
DS 29.4: Vortrag
Donnerstag, 28. Februar 2008, 18:45–19:00, H 2013
Metal nanostructure matrices through laser-patterning of thin films using phase mask projection — •Marisa Mäder1, Jürgen Gerlach1, Thomas Höche1, Michael Lorenz2, Marius Grundmann2, and Bernd Rauschenbach1 — 1Leibniz Institute of Surface Modification, Permoserstraße 15, 04318 Leipzig, Germany — 2Universität Leipzig, Institut für Experimentelle Physik II, Abteilung Halbleiterphysik, Linnéstraße 5, 04103 Leipzig, Germany
Metallic nanostructures feature a wide range of possible applications. Especially within the area of nanowire growth, well ordered matrices of substrate-bound metallic structures are qualified as catalysts. Furthermore, applications as biosensors, for surface enhanced Raman effect-driven phenomena, and for optical data transfer are conceivable. This paper presents very well ordered metal nanostructure matrices that are made by an interference technique called diffraction mask projection laser ablation. A thin metal film (Au, Ni, Ti, and others) is illuminated by a laterally varying laser intensity pattern. The pattern is created by phase mask projection and four-beamlet interference of an Excimer laser (KrF, 248 nm, 30 ns). The pattern is demagnified to nanoscales by passing a Schwarzschild objective. The film is removed from the substrate at positions of high laser intensities. The remaining film material melts and forms structures of minimized surface energy at the positions of the heat sinks. It is shown that nanodots-matrices (Au, Ni) as well as nano-gratings (Ti) form under different conditions. Additional, results of 3D-nanostructure growth using templates prepared by this technique are presented.