Berlin 2008 – wissenschaftliches Programm
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DS: Fachverband Dünne Schichten
DS 33: Surface Modification
DS 33.3: Vortrag
Donnerstag, 28. Februar 2008, 15:15–15:30, H 2032
Nano-patterning of diamond-like carbon by electron-assisted local oxidation in humid environment — •Thomas Mühl1, Andreas Winkler1, and Sverre Myhra2 — 1Leibniz-Institut für Festkörper- und Werkstoffforschung IFW Dresden, Helmholtzstr. 20, D-01069 Dresden — 2Oxford University Begbroke Science Park, Department of Materials, University of Oxford, Oxford OX5 1PF, UK
Carbon-based materials such as diamond-like carbon (DLC) thin films and carbon nanotubes are attracting a great deal of attention due to their novel and versatile properties and likely applications. In particular, good chemical stability has been ascribed to these materials. Recently it has been shown that DLC can be patterned on the nm-scale by local electro-oxidation in a humid environment, where localization is defined by either "tunnel" current or spreading current in STM or AFM modes (Scanning Tunnelling and Atomic Force Microscopy), respectively. The process has now been extended to oxidative patterning of DLC films in an environmental SEM (Scanning Electron Microscope) in the presence of 10 to 100 Pa of water vapour.
Examples for nano-patterning of DLC thin films, both on substrates and self-supporting, will be presented. Preliminary data of the SEM-based process suggests that the volume removed by oxidation is linearly dependent on dose, approximately inversely proportional to the e-beam energy in the investigated energy range of 10 to 25 keV, while the dependence on partial pressure of water vapour has a minor effect.