Berlin 2008 – wissenschaftliches Programm
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DS: Fachverband Dünne Schichten
DS 37: Vibrational Spectroscopy of Nanolayers with Optical Probes
DS 37.4: Vortrag
Freitag, 29. Februar 2008, 14:45–15:00, H 2013
Near-field Raman Spectroscopy utilizing scattering by noble metal particles on SiGe samples — •Peter Hermann1, Michael Hecker2, Sebastian Pankalla2, Jochen Rinderknecht2, Phillip Olk3, Marc Tobias Wenzel3, rené kullock3, Yvonne Ritz2, Ehrenfried Zschech2, Peter Kücher1, and Lukas Eng3 — 1Fraunhofer CNT, 01099 Dresden, Germany — 2AMD Saxony LLC & Co KG, Material Analysis Department, 01099 Dresden, Germany — 3Institut für Angewandte Photophysik TU-Dresden, 01069 Dresden, Germany
Noble metal particles show very interesting and complex optical properties. One of the most striking phenomena encountered in these particles are electromagnetic resonances due to collective oscillations of the conduction band electrons. The excitation of plasmons leads to an increased light scattering and to an enhanced electromagnetic near-field. Due to the high optical resolution which can be reached by near-field measurements, tip enhanced Raman spectroscopy (TERS) therefore became an inevitable analytical method for probing stress related phenomena in the semiconductor industry. First TERS measurements on SiGe structures indicate a much better optical resolution as compared to far-field experiments. However, the full potential of this method is not exploited yet; for instance, the observed Raman signal enhancement stemming from SiGe as investigated here, contains a composition of several contributions, such as different far-field polarization modes, scattered light, as well as near-field contributions. Careful analysis of these contributions is inevitable for local mechanical stress analysis.