Dresden 2009 – wissenschaftliches Programm
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HL: Fachverband Halbleiterphysik
HL 1: III-V semiconductors I
HL 1.8: Vortrag
Montag, 23. März 2009, 12:15–12:30, BEY 81
III/V surface channel devices: substrate preparation, interface passivation and growth — •Mirja Richter1, Chiara Marchiori1, David J. Webb1, Christian Gerl1, Marilyne Sousa1, Christophe Rossel1, Caroline Andersson1, Roland Germann1, Heinz Siegwart1, Edward Kiewra2, Yanning Sun2, Joel De Souza2, Devendra Sadana2, Thanasis Dimoulas3, and Jean Fompeyrine1 — 1IBM Zurich Research Laboratory, Rueschlikon, Switzerland — 2IBM Watson Research Center, Yorktown Heights, NY, USA — 3National Center for Scientific Research Demokritos, Athens, Greece
III/V-based metal-oxide-semiconductor field effect transistors (MOSFET) are considered as promising candidates for replacing Si-based devices at and beyond the 22 nm CMOS technology node. For their fabrication, it is essential to develop an effective surface passivation. Indeed, the presence of defects at the III/V-oxide interface introduces energy states in the gap which can pin the Fermi level. In addition, to profit from their intrinsic higher charge carrier mobility, high quality III/V channel deposition as well as surface preparation procedures are indispensable.
We will discuss MBE grown gate stacks with HfO2 dielectric and Si passivation layers. Structural characterization is accomplished by RHEED and in-situ X-ray photoelectron spectroscopy. Electrical properties of the stacks are studied by measurements performed on capacitors. By this means a minimum Si passivation layer thickness is determined. Data on long channel GaAs nFETs will also be presented.