Parts | Days | Selection | Search | Downloads | Help

P: Fachverband Plasmaphysik

P 9: Poster: Niedertemperaturplasmen

P 9.30: Poster

Tuesday, March 31, 2009, 17:30–19:30, Foyer des IfP

Ion flux distribution functions for argon, argon/nitrogen and argon/oxygen discharges by ICP with superimposed static magnetic field — •Vasile Vartolomei and Rainer Hippler — Institut für Physik, E.-M.-Arndt Universität Greifswald, Felix-Hausdorff-Str. 6, D-17487 Greifswald

Our plasma is produced by an inductively coupled RF discharge (13.56 MHz) with an additional small static magnetic field (few mTesla). The earth free single turn inductive coil comes in contact with plasma. The design of experimental device combines the plasma source region with an expansion region (substrate region). During the plasma operation we measured the ion distribution functions (IDFs) of energetic ions in the expansion region using a combination of a quadrupole mass spectrometer and an electrostatic energy analyzer. We obtained the IDFs in the range 0.06 to 1 Pa with powers from 50 to 600 W. We investigated the passage from capacitive to inductive and then to ECWR (electron cyclotron resonance mode) using different gas mixtures: argon, nitrogen, oxygen, argon/nitrogen and argon/oxygen. The IEDFs shape evolves from a mono-peak structure to multi-peak structure (three, four or six peaks). Possible explanations for the additional splitting are discussed.