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BP: Fachverband Biologische Physik

BP 34: Posters: New Technologies

BP 34.14: Poster

Donnerstag, 25. März 2010, 17:15–20:00, Poster B2

Fabrication of hybrid nano-micro-fluidic channels with extreme aspect ratios — •Eugenie Fredrich, Martina Everwand, Jörg Käsewieter, Dario Anselmetti, and Jan Regtmeier — Experimental Biophysics & Applied Nanoscience, Bielefeld University, Universitätsstraße 25, 33615 Bielefeld, Germany

In the micro- and nanofluidic analysis of single molecules, often complex 3D geometries with high aspect ratios are required. Among the basic preconditions for the production of the structures, stability is the most fundamental one, but hard to realize with soft lithography. Furthermore, a spatial accuracy within the range of a few nanometers is especially required for nanofluidics.

In the novel method presented here, contact lithography with the photoresist SU8 is employed to create negative relief structures as small as 670 nm. The microfluidic device is molded with a polydimethylsiloxane (PDMS) bilayer. The first thin layer consists of h-PDMS, which accounts for the stability of the fabricated structures, whereas the second thicker layer is made of the more elastic Sylgard-184 PDMS allowing for flexibility and experimental handling. The resulting channels have a width of 200 µm and free hanging barrier structures forming a flow-through gap of 670 nm, i.e. an aspect ratio of about 300:1.