Regensburg 2010 – wissenschaftliches Programm
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DS: Fachverband Dünne Schichten
DS 9: Poster: Synthesis of Nanostructured Films by Self-organization, Thermoelectric Thin Films and Nanostructures, High-k and Low-k Dielectrics, Layer Deposition Processes, Layer Growth, Layer Properties, Application of Thin Films, Surface Modification, Hard and Superhard Coatings, Metal Layers
DS 9.44: Poster
Montag, 22. März 2010, 15:00–17:30, Poster D1
Multilayer Bragg Fresnel Zone Plate for coherent HHG radiation — •Christian Späth1, Michael Hofstetter2, Jürgen Schmidt1, Ferenc Krausz1,2, and Ulf Kleineberg1,2 — 1Fakultät für Physik, Ludwig Maximilians Universität München, Garching, Germany — 2Max Planck Institut für Quantenoptik, Garching, Germany
Coherent Diffractive Imaging in the (soft) X-ray regime is an emerging new lens-less X-ray microscopy technique with the future potential of molecular or even atomic resolution, because it is ultimately limited by the wavelength of the illuminating radiation and not by the imaging quality of the x-ray lens. However, this technique depends on the availability of coherent x-ray sources as well as optics for spectral filtering and focusing. We describe the development fabrication and testing of a reflective multilayer Bragg Fresnel phase zone plate for focusing coherent XUV radiation at 13 nm wavelength from a High Harmonic Generation source. This x-ray optical device serves for spectral filtering as well as sub-micron focusing of the HH spectrum in a single element for largely reduced losses. Large zone plate structures (conventional, spiral) matching the HH beam size are recorded by e-beam lithography in ultrathin HSQ e-beam resist and over-coated with a reflective Mo/Si multilayer by Ion Beam Deposition. By accurately matching the groove depth of the diffractive structure to odd multiples of the quarter Bragg wavelength, the total diffraction efficiency can be improved by a factor of 4 theoretically compared to amplitude structures.