Regensburg 2010 – wissenschaftliches Programm
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HL: Fachverband Halbleiterphysik
HL 61: Poster II: Materials, Interfaces and Heterostructures
HL 61.41: Poster
Donnerstag, 25. März 2010, 18:00–20:00, Poster D1
Nanomechanical Resonators — •Tommy Schönherr1, Jochen Grebing1, Takashi Sasaki2, Matthias Wieser1, and Artur Erbe1 — 1Division of Nanofunctional Films, Forschungszentrum Dresden-Rossendorf, Germany — 2Division of Nanosystem Engineering, Tohoku University, Japan
Nanomechanical resonators offer multiple possibilities for the use as sensors and actors. The main challenges in this field of research are the understanding of the damping on the nanometer scale as well as reaching the quantum limit.
In order to measure the current transport in nanomechanical pendulums and vibrating nanowires reproducibly, arrays of nanometer sized structures have to be connected to micron sized contact pads in a reliable way. The pendulums should be designed in such a manner that they transport only single or few electrons during each oscillation. The fabrication of these devices made of silicon by using the techniques of electron-beam lithography, metal evaporation, lift-off and reactive ion etching is presented.
The temperature and magnetic field dependence of the damping of freely suspended silicon nanowires with eigenfrequencies in the order of several 100 MHz as well as measurement data on vertical nanomechanical pendulums between two electrodes are shown.