Regensburg 2010 – wissenschaftliches Programm

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MA: Fachverband Magnetismus

MA 33: Poster II

MA 33.92: Poster

Freitag, 26. März 2010, 11:00–14:00, Poster B1

Preparation and characterization of sputtered CoFeB/MgO/CoFeB-based TMR magnetic tunnel junctions (MTJs) — •Neda Sadrifar and Ulrich Herr — Institut für Mikro- und Nanomaterialien, Universität Ulm, 89081 Ulm

Magnetic tunnel junctions with crystalline (001)-oriented MgO tunnel barrier recently lead to achievement of extremely large tunneling magnetoresistance ratios (TMR) at room temperature. Arrays of such MTJ sensors are of great promise for the detection of magnetic or magnetically-labeled nanoparticles because of their high sensitivity and flexibility in resistance design. In this study, CoFeB/MgO/CoFeB-based MTJs were prepared by magnetron sputtering, standard photolithography and ion milling. First results show a TMR ratio of 32% at RT; which will be further improved. Characterization with respect to their microstructure and roughness was carried out by XRD, AFM, SEM and TEM. The goal is to build a detection system with high magnetic sensitivity which permits the detection and magnetic characterization of single magnetic nanoparticles.