Regensburg 2010 – wissenschaftliches Programm
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MM: Fachverband Metall- und Materialphysik
MM 46: Nanostructured Materials III
MM 46.6: Vortrag
Donnerstag, 25. März 2010, 11:30–11:45, H16
Plasmonic Nano Structures via Electron Beam Induced Deposition — •Katja Höflich1,2, Ulrich Gösele2, Jörg Petschulat3, Norik Janunts3, Renbin Yang2, Andreas Berger1,2, Thomas Pertsch3, and Silke Christiansen1,2 — 1IPHT Jena — 2MPI Halle — 3IAP, FSU Jena
A wealth of methods have been used to create plasmonic nanostructures. Many of them lack the control needed to realize nanostructures of choice. We in our group use a dual beam instrument (FEI xP Dual Beam Nova Nanolab 600) for the direct write of nanostructures by locally cracking an organo-metallic precursor gas (dimethyl-gold(III)-acetylacetonate) with the electron beam. Therewith, it is possible to fabricate high precision structures of a few tens of nanometers in diameter with various shapes on any conductive substrate. We will present needles and pillars with tip diameters down to 10 nm as well as spirals with up to 7 windings with a diameter of 150 nm. The structures that form during decomposition of the organo-metallic precursor gas contain a matrix of carbonaceous material in which metal single crystalline nanocrystals of a few nanometers in diameter are dispersed. To densify the gold content and realize pure gold nano-needles, the carbon is oxidized out of the structures which thereby largely retain their shapes, using ozone and water vapor treatment at moderate temperatures. We present optical spectra of as-written composite and ozone treated multi-crystalline gold nanostructures that are realized on indium-tin-oxide (ITO) coated glass substrates. From these nanostructure ensembles an effective permittivity is calculated.